电射流高频脉冲电源主电路的仿真与研究
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引用本文:陈朝大1,2?覮,郭钟宁1,温亮1,陈晓磊1,邓宇1.电射流高频脉冲电源主电路的仿真与研究[J].计算技术与自动化,2019,(1):1-4
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陈朝大1,2?覮,郭钟宁1,温亮1,陈晓磊1,邓宇1 (1.广东工业大学 机电工程学院广东 广州 5100062. 广东农工商职业技术学院广东 广州510507) 
中文摘要:针对电射流掩膜加工工艺对电源的性能要求,提出了高频逆变的解决方案。自行设计高频脉冲电源主电路,通过整流滤波桥式逆变,实现对频率、占空比的调节,利用SimPowerSystems软件建立了仿真模型,对逆变器输出交流电压、逆变器输出交流电流、直流侧电压、直流侧电流进行仿真分析。利用电力电子控制设备搭建了实验平台,对驱动电路的输入输出、逆变电路IGBT的通断控制等进行了实验。实验表明,研制的主电路在高频逆变下能够对负载(灯泡)进行控制,验证了实验装置的合理性和科学性。
中文关键词:整流  逆变  SimPowerSystems仿真建模
 
Fluidic High Frequency Simulation and Research of the Main Power Circuit of Pulse
Abstract:According to the performance requirements of fluidic mask processing on the power supply,solutions of high frequency inverter is investigated. To design high frequency pulse power source main circuit,the rectifier filter inverter bridge,the realization of frequency,duty cycle regulation,simulation model is built by using SimPowerSystems software,the simulation analysis of the inverter output AC voltage and inverter output current,DC voltage,DC current. The experimental platform is built by using the power electronic control device. The input and output of the drive circuit,the on-off control of the inverter circuit and the IGBT are also tested. The experimental results show that the developed main circuit can control the load (bulb) under high frequency inverter,and verify the rationality and scientific of the experimental device.
keywords:rectifier  inverter  SimPowerSystems simulation modeling
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